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Supporting Data for "Pitfalls in Parameters: Practical Process Development in Chemical Vapor Processing of SiC"

    Benjamin W Lamm | Oak Ridge National Laboratory
    Valencia Ramirez | Oak Ridge National Laboratory
    Alex Rogers | Oak Ridge National Laboratory
    Takaaki Koyanagi | Oak Ridge National Laboratory
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Description

CALculation of PHAse Diagrams (CALPHAD) was used to produce equilibrium phase diagrams of the MTS/H2 system. These were calculated in FactSage 8.2 using a combination of the FactPS and SGTE Solutions 2022 databases. Equilibrium was calculated for 185 gas species, 36 pure liquids, 8 pure solids, 1 liquid solution, and 22 solid solutions. Phase diagrams were calculated with 25 °C steps in temperature from 700 to 1325 °C and 10 torr steps in pressure from 20 to 760 torr.

Funding Information

DOE Contract Number

AC05-00OR22725

Originating Research Organization

Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)

Sponsoring Organization

Office of Science (SC)

Related Works

Details

DOI

https://doi.org/10.13139/ORNLNCCS/3007123

Release Date

July 22, 2026

Subject

INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY

Dataset

Dataset Type

ND Numeric Data

Cite This Dataset:

Lamm, B., Ramirez, V., Rogers, A., Koyanagi, T. (2026). Supporting Data for "Pitfalls in Parameters: Practical Process Development in Chemical Vapor Processing of SiC". Oak Ridge National Laboratory. https://doi.org/10.13139/ORNLNCCS/3007123.

Acknowledgements

This work was carried out [in part] at Oak Ridge National Laboratory, managed by UT-Battelle, LLC for the U.S. Department of Energy under contract DE-AC05-00OR22725.